Kev tshawb fawb thiab daim ntawv thov xwm txheej ntawm Ultra-nyias pob zeb diamond txiav Discs
Feb 26, 2023
Tso lus
Ultra-nyias pob zeb diamond txiav discstau maj mam tau txais tib neeg cov xim vim lawv qhov zoo xws li ultra-thin txiav groove dav, du txiav puas, tsis kam lees tus nqi, thiab siab txiav efficiency.
Tsab ntawv xov xwm no qhia txog cov kev tshawb fawb thiab kev siv cov xwm txheej ntawm cov txheej txheem tseem ceeb ntawm ultra-thin pob zeb diamond txiav discs hauv 10 xyoo dhau los, thiab qhia txog kev npaj ntawm ultra-nyias pob zeb diamond txiav discs, suav nrog electroplating thiab curing resin txoj kev. Cov txheej txheem electroplating yog yam ntxwv los ntawm nws cov khoom siv yooj yim, ntsuab Qhov zoo ntawm kev tiv thaiv ib puag ncig thiab cov khoom siv rov ua dua tshiab tau dhau los ua txoj kev npaj rau kev lag luam loj. Kab lus thaum kawg taw qhia nws txoj kev txhim kho.
1 Kev Taw Qhia
Lub hnub ci zog yog lub zog huv si uas tsis muaj zog, nws txoj kev loj hlob thiab kev siv tau zoo rau tib neeg, thiab kev lag luam siv lub hnub ci zog tau dhau los ua lub ntiaj teb sib txawv. Hnub ci hlwb yog cov cuab yeej siv hluav taws xob hnub ci uas tau yug los ntawm qhov no. Silicon-raws li hnub ci hlwb muaj xws li: ib lub hlwb, ntau-thin film cells, thiab lwm yam. Ntawm lawv, ib lub hnub ci lub hnub ci muaj qhov kev hloov pauv siab tshaj plaws, thiab qhov hloov pauv photoelectric tuaj yeem ncav cuag 23 feem pua, uas nyob hauv txoj haujlwm tseem ceeb hauv daim ntawv thov loj. thiab industrial ntau lawm nyob rau theem no. Nyob rau hauv xyoo tas los no, nrog rau kev loj hlob tas mus li thiab kev txhim kho ntawm semiconductor manufacturing technology, tus nqi ntawm silicon wafer raug txo qis, tab sis txiav nqi ntawm silicon wafers siv nyob rau hauv lub hnub ci hlwb tseem siab, accounting rau ntau tshaj 30 feem pua ntawm tag nrho cov. raug nqi ntawm lub hnub ci hlwb. Txhawm rau txo qhov muaj peev xwm ntawm ntug chipping thaum lub sij hawm silicon wafer ua thiab txhim kho kev siv cov khoom, silicon wafer txiav feem ntau siv cov hniav nyias. Cov hniav uas siv tam sim no tuaj yeem muab faib ua ob hom: electroplated hniav nrog lub thickness ntawm 15-100 μm thiab resin hniav nrog ib tug tuab ntawm 100-500 μm. Nyob rau hauv kuv lub teb chaws, tam sim no ntau lawm technology ntawm electroplated pob zeb diamond ultra-nyias txiav discs yog tseem tsis paub tab, feem ntau nyob rau hauv cov theem ntawm kev tshawb fawb, thiab lub ultra-thin txiav discs yuav tsum tau rau ntau lawm cia siab rau imports los ntawm lub tebchaws United States, lub teb chaws Yelemees thiab Nyiv. . Yog li ntawd, high-precision pob zeb diamond txiav cov cuab yeej Kev tshawb fawb thiab kev loj hlob technology ntawm kuv lub teb chaws cov cuab yeej thiab microelectronics kev lag luam yog ib qho teeb meem ceev yuav tsum tau daws.
2 Tshawb nrhiav cov xwm txheej ntawm ultra-nyias pob zeb diamond txiav discs
2.1 Curing resin method
Kev tsim cov pob zeb diamond ultra-thin txiav discs los ntawm cov txheej txheem cob yog ib txoj hauv kev uas tuaj yeem tau txais cov duab zoo. Feem ntau, thermosetting phenolic resin yog siv los ua ib daim ntawv khi. Nws txoj kev yog sib tov pob zeb diamond abrasive nplej nrog cob, thiab tom qab ntawd siv kub nias rau sinter thiab kub sib tsoo yog ua tom qab kho, txheej txheem yuav siv sij hawm ntau teev thiab yog li kim los tsim. Nrog kev nce qib ntawm thev naus laus zis, cov khoom siv hluav taws xob tuaj yeem kho tau maj mam hloov los ntawm lub teeb-kho tau cov resins, uas yog tsim los ntawm cov polymers (photocrosslinkable polymers), reactive diluents (photopolymerizable monomers), photoinitiators thiab additives. muaj pes tsawg leeg. Qhov tseem ceeb tshaj qhov sib txawv ntawm nws thiab thermal curing resin yog tias nws cov txheej txheem kho yog cov txheej txheem tshuaj lom neeg tshwm sim los ntawm kev nqus lub teeb ntawm qhov tsim nyog wavelength, thiab nws qhov kev hloov pauv ntawm cov kua rau cov khoom yog qhov tshwm sim ntawm qhov hnyav molecular, tsis yog los ntawm cov kuab tshuaj volatilization, yog li ntawd. nws muaj kev kho sai, tsis muaj kuab paug, thiab txuag hluav taws xob zoo, tab sis qhov txwv tsis pub yog tus nqi siab ntawm nws cov khoom siv raw.
Siv photocurable cob los tsim ultra-nyias pob zeb diamond txiav discs, Peng Wei, Gu Taihong, thiab lwm yam. siv photocurable cob raws li ib tug binder kom ntse tsim ib tug ultra-nyias pob zeb diamond txiav log nrog ib tug tuab ntawm 0.15mm, thiab ua tiav. kev txiav txim siab ntawm ib qho. Cov duab ntawm lub log sib tsoo tom qab txiav yog: 53mm × 40mm × 0.15mm. Kev txiav txiav tau ua tiav ntawm cov qauv npaj hauv qhov kev sim. Los ntawm kev txheeb xyuas cov ntaub ntawv sim, qhov kawg tshwm sim qhia tau hais tias ntxiv qhov tsim nyog ntawm SiO2. Nws tuaj yeem txhim kho tag nrho cov kev ua tau zoo ntawm cov txiav disc, thiab thaum cov ntsiab lus ntxiv yog 48, cov nyhuv ntawm cov txiav txiav yog qhov zoo tshaj plaws, thiab cov txiav txiav yog smoother. Raws li kev txheeb xyuas, qhov laj thawj tseem ceeb ntawm qhov tshwm sim no yog kev sib tsoo ntawm SiO2 hais txog ntawm qhov chaw ntawm qhov zawj los ntawm kev faib tawm siab ntawm SiO2 cov khoom nyob rau saum npoo ntawm qhov qub toj thiab lub log sib tsoo.
Hauv 2004, raws li kev siv thev naus laus zis sai, Yao Chunyan, Peng Wei, thiab lwm yam. tau kawm txog kev tsim khoom sai ntawm ultra-nyias pob zeb diamond txiav sib tsoo log los ntawm cov ntawv siv photosensitive resin ua ib daim ntawv khi, thiab ntxiv Japanese REV whiskers ( 13μm × 70μm), txhawm rau txhim kho cov khoom siv ntawm pob zeb diamond txiav daim ntawv cog lus. Lub Knoop hardness ntawm ib thooj yog hais txog K1000, thaum lub Knoop hardness ntawm pob zeb diamond yog siab li K7000E. Sib tov pob zeb diamond micropowder thiab whiskers rau hauv cov npaj photosensitive cob nyob rau hauv ib tug ntau npaum li cas, do tusyees, thiab nqus mus rau defoam, ncuav rau hauv nyias-txiav txiav log pwm nyob rau hauv chav tsev kub, thiab kho thiab kho nws los ntawm ultraviolet hluav taws xob. Qhov loj ntawm lub pob zeb diamond txiav lub log yog: 52mm × 40mm × 0.15mm. Kev ntsuam xyuas ntawm kev txiav cov discs nrog cov qauv sib txawv ua pov thawj tias ntxiv REV whiskers rau photosensitive resin txiav discs tuaj yeem txhim kho qhov kev sib tsoo ntawm cov txiav disc thiab txhim kho qhov zoo ntawm cov khoom txiav tom qab txiav.
Ntxiv SiO2 lossis whiskers ib leeg rau daim ntawv txiav yog txwv rau kev txhim kho cov ntawv txiav thiab tsis tuaj yeem ua tau raws li qhov xav tau tiag tiag. Hauv 2004, Li Chengfu thiab lwm tus siv cov epoxy resin LC-2800 uas tsim los ntawm Showa Polymer Company ua tus khi. Cov cob yog kho los ntawm irradiation ntawm ultraviolet lub teeb los tsim ultra-thin txiav nplooj, thiab nws hardness, lub zog thiab hnav tsis kam yog txhim kho los ntawm kev ntxiv SiO2 hais thiab fibers ua fillers. Txoj kev tsim ntawm daim ntawv dicing yog txoj kev kub ceev ceev txheej txheej, uas yog, ua ntej tso cov kua resin rau ntawm qhov chaw ntawm lub substrate, thiab tom qab ntawd cia lub substrate tig ntawm qhov kub ceev, kom cov kua resin diffuses ntawm lub substrate. substrate los tsim ib zaj duab xis nyias, thiab irradiates nrog ultraviolet lub teeb nyob rau sab sauv 10 hli. Yuav kom kho cov resin solidified, thiaj li yuav tsim ultra-thin txiav hniav, qhov luaj li cas ntawm cov hniav mus sib hais yog 54mm × 40mm × 0.05mm. Kev sib piv kev sib piv ntawm cov qauv sib txawv ua pov thawj tias cov txheej txheem txheej txheej tuaj yeem siv los tsim cov ntawv txiav pob zeb diamond ultra-nyias, thiab ntxiv cov granular fillers tuaj yeem txhim kho qhov tawv, thiab cov fiber ntau tuaj yeem ua kom lub zog. Cov pa roj carbon fiber ntau muaj kev ua haujlwm zoo dua.
2.2 Txoj kev electroplating
Txoj kev electroplating yog txheej txheem ntawm kev tso ib txheej nyias ntawm lwm cov hlau los yog alloys ntawm cov hlau substrate los ntawm kev siv lub hauv paus ntsiab lus ntawm electrolysis. Nws yog txheej txheem ntawm kev siv electrolysis los txuas ib txheej ntawm cov yeeb yaj kiab hlau rau saum npoo ntawm cov hlau lossis lwm yam khoom siv. Cov khoom nkag mus rau hauv cov txheej txheem sib xyaw los ntawm cov txheej txheem electrolysis. Guglielmi ntseeg hais tias cov khoom nkag mus rau hauv cov txheej txheej feem ntau yog nyob ntawm ob-kauj ruam adsorption mechanism: thawj kauj ruam yog tias cov khoom nqa ions thiab hnyav molecular films yog adsorbed rau saum npoo ntawm electrode, uas yog hu ua qaug zog adsorption. Nws yog nyob rau hauv equilibrium nrog cov hais raug tshem tawm hauv da dej. Cov khoom nyob rau hauv lub xeev tsis muaj zog adsorbed tshem tawm lawv cov adsorbed ions thiab solvated zaj duab xis, thiab ncaj qha kev sib cuag nrog lub cathode nto los tsim irreversible electrochemical adsorption, uas dhau los ua ib tug muaj zog adsorption kauj ruam. Qhov no yog ua raws li los ntawm embedding ntawm muaj zog adsorbed hais rau hauv txheej thaum lub sij hawm hlau electrodeposition txheej txheem.
Xyoo 2000, Liu Dingfu ntawm South China University of Technology tau qhia ib txoj hauv kev siv cov plating sib xyaw, uas yog txheej txheem ntawm kev tsim cov pob zeb diamond ncig pom hniav nrog npib tsib xee-cobalt alloy txheej ua cov nplaum. Hniav) Siv cov saw nyias nyias txhua txhua 6-7mm kom pom qhov sib txawv ntawm 9mm-ntev raws txoj kab uas hla, kom cov pob zeb diamond tom ntej thiab cov txheej txheej ua tus neeg sawv cev sib txuas muaj qhov zoo sib xws ntawm cov khoom siv mosaic, yog li mus ntxiv. ntxiv dag zog rau kev sib tshuam ntawm cov txheej txheem sib xyaw thiab lub zog substrate, ua kom lub neej ntev ntawm cov saw hniav. Txoj kev xuab zeb siv txoj kev xuab zeb, uas yog, siv lub dropper los nqus cov pob zeb diamond hydrophilized thiab sib npaug sib npaug ntawm qhov chaw nce siab, thiab tom qab ntawd me ntsis vibrate lub saw hniav kom cov pob zeb diamond hais tuaj yeem nyob ruaj khov nrog cov substrate. . Tom qab pre-plating, sanding, thickening plating, thiab ci plating, ib tug zoo txheej yog thaum kawg tau. Nws yog thaum kawg ua pov thawj tias npib tsib xee-cobalt alloy tuaj yeem siv los ua tus khi kom tau txais cov txheej txheem zoo thaum ua cov cuab yeej pob zeb diamond.
Xyoo 2002, Guo Tiefeng thiab Yang Yanjun tau hais tias phosphate yog thawj zaug siv los npaj cov tshuaj hloov pauv tshuaj. Cov mis yog (g / L): oxalic acid 5, phosphoric acid 15, sodium oxalate 4, disodium phosphate 1O, sodium chlorate 5; Kev khiav hauj lwm tej yam kev mob rau: kub 20 degree, lub sij hawm 5min. Cov txheej txheem tshuaj hloov pauv yog qhov zoo tshaj plaws nrog austenitic stainless hlau, uas muaj cov khoom siv hluav taws xob zoo, tuaj yeem ua rau cov txheej txheem electrodeposition mus zoo, thiab tiv thaiv cov khoom siv electrodeposition los ntawm kev sib xyaw ua ke nrog cov substrate, txhawm rau pab txhawb kev tshem tawm ntawm txheej.
Rau cov txheej txheem electrochemical deposition, Ni-Co electroplating tov yog siv. Cov mis ntawm cov tshuaj plating yog (g / L): npib tsib xee sulfate 220-240, cobalt sulfate 15-30, boric acid 25-35, sodium chloride 10-20, thiab tsim nyog tus nqi ntawm patent additives , Pob zeb diamond hmoov 5-10. Kev ua haujlwm ntawm qhov kev sim yog: electroplating kub 45 degree ~ 50 degree, pH tus nqi 4.1 ~ 4.5, Dk=2A / dm³, cua twj tso kua mis stirring, intermittent lub sij hawm 10min. Cov txheej txheej yog stripped los ntawm lub substrate los ntawm cua sov, thiab stamped rau ib tug txias stamping tshuab. Rau cov khoom tiav ua tiav hauv qhov kev sim, cov ntawv txiav cov ntawv sib piv kev sim qhia tau hais tias cov khoom tuaj yeem ua tau raws li qhov yuav tsum tau ua, thiab tus nqi raug txo los ntawm 1/3.
Zhou Linhua, Xu Jianhong, thiab lwm yam ntawm Yim Lub Tsev Kawm Ntawv Tshawb Fawb ntawm Shanghai Nuclear Kev Lag Luam, hauv daim ntawv thov patent nyob rau hauv 2003, piav qhia meej txog cov txheej txheem ntawm kev tsim cov pob zeb diamond ultra-nyias txiav discs . Cov nickel phaj yog siv los ua tus anode, thiab stainless hlau yog siv los ua cathode. Cov tshuaj electroplating yog tau los ntawm kev ntxiv pob zeb diamond abrasives, boric acid thiab additives rau cov tov tov ntawm hydrated nickel hlau ntsev los yog hydrated nickel hlau ntsev thiab lwm yam hydrated hlau ntsev. Cov mis yog (g/L): sulfuric acid Nickel 150-300, cobalt sulfate 3-20, boric acid 25-40, nickel chloride 30-60, thawj brightener 0. 2-2, Secondary brightener 0.2-2, lubricant 0.{11}}. Electroplating txheej txheem tsis yog: Dk{12}}A / dm³, pH tus nqi 4.1 ~ 4.5, kub 45 degree ~ 50 degree, pob zeb diamond ceev 5 ~ 20g / L, lub sij hawm yuav tswj cov thickness ntawm composite electroplating txheej. Muab cov cathode thiab anode rau hauv cov tshuaj electroplating, thiab tom qab lub hwj chim qhib, nyob rau hauv qhov kev txiav txim ntawm electrons, lub pob zeb diamond abrasive thiab hlau ions yog uniformly eutectoid ntawm lub cathode substrate kom tau ib tug composite electroplating txheej. Maj mam khoov cov cathode substrate electroplated nrog cov txheej txheem sib xyaw rau hauv cov duab arc, cov txheej txheem electroplating tau yooj yim sib cais los ntawm cathode substrate, thiab thaum kawg tau sib cais pob zeb diamond thiab npib tsib xee-cobalt txheej txheej. Tom qab peb teev ntawm electroplating, ib txheej txheej ntawm 20 μm tuaj yeem tau txais.
Raws li cov substrates sib txawv thiab txawv stripping txoj kev ntawm composite coatings, nyob rau hauv 2009, Liu Jinlong ntawm Dalian University of Technology qhia nyob rau hauv kom meej cov txheej txheem ntawm kev siv aluminium alloy raws li lub substrate rau pob zeb diamond-nickel composite coatings nyob rau hauv tsab xov xwm "Kev tshawb fawb ntawm kev txhim kho kev ua tau zoo. ntawm Composite Electrodeposited Pob Zeb Diamond Saws". Kev npaj, aluminium alloy substrate yog muab tso rau hauv lub plating tank raws li cathode tom qab pre-plating kev kho mob rau co-deposition ntawm pob zeb diamond hlau, tom qab tau txais qhov xav tau thickness ntawm txheej, nws raug tshem tawm, electrolyzed nyob rau hauv tus kheej-ua electrolytic tank. , thiab lub substrate yog corroded nrog ib tug haum electrolyte poob kom tau pob zeb diamond composite txheej. Cov txheej txheej tau tau kawm ntawm cov khawb thiab cov hniav hnav ntawm silicon wafer thiab iav. Tom qab txiav, cov hniav tseem ntse tsis muaj warping thiab lwm yam deformations, thiab kev ua tau zoo raws li qhov yuav tsum tau ua. Nws Changyao tau qhia txog ib txoj hauv kev ua ultra-nyias pob zeb diamond txiav discs nrog coated yas raws li cov substrate nyob rau hauv patent thov rau xyoo 2009.
Nws xaiv cov yas coated raws li cov cathode substrate, pre-precipitates ib txheej ntawm pob zeb diamond rau saum npoo, thiab muab tso rau hauv ib qho electrolyte tov nrog 18-25 nickel ntsev, 1-2 sodium ntsev, 1-3 cobalt thiab 2-4 kua qaub. Ntawm lawv, high-purity npib tsib xee phaj yog siv los ua anode substrate, qhov kub thiab txias yog 30 degree ~ 40 degree, thiab pH tus nqi yog 4.2-4.6. Lub pob zeb diamond yog tso rau ntawm pob zeb diamond nto ntawm cathode substrate los ntawm electrodeposition los sib sau cov pob zeb diamond, yog li tau txais lub thickness ntawm 0.5. 02 ~ 1 hli electroplating txheej. Tom qab ntawd muab cov cathode substrate nrog cov txheej txheej electroplating rau hauv cov tshuaj chloroform npaj ntxiv nrog 2 ethanol, yaj cov txheej yas, thiab tau txais cov pob zeb diamond-nickel composite txheej, thiab txiav nws mus rau hauv qhov xav tau loj los ntawm kev ua haujlwm tom qab.
3 Outlook
Nrog rau txoj kev loj hlob ntawm kev tshawb fawb thiab thev naus laus zis thiab kev txhim kho ntawm tib neeg cov qauv kev ua neej, qhov kev thov rau cov hlais yog nce zuj zus nyob rau ib hnub, thiab kev txhim kho ntawm cov hlais zoo yog qhov tseem ceeb dua rau ultra-thin cut slices. Txawm li cas los xij, tsis muaj txoj hauv kev tsim khoom lag luam paub tab hauv Suav teb, thiab cov khoom lag luam tuaj txawv teb tau tso siab rau. Tus nqi yog siab, yog li nws daim ntawv thov tau raug txwv ntau heev. Ntawm ntau txoj kev tsim khoom, txoj kev electroplating tau dhau los ua txoj hauv kev zoo tshaj plaws rau kev lag luam loj vim nws qhov zoo xws li cov khoom siv yooj yim, kev tiv thaiv ib puag ncig ntsuab, thiab cov khoom siv rov ua dua tshiab. Yog tias qee qhov kev ntsuas tuaj yeem ua kom luv luv lub sijhawm siv hauv cov txheej txheem tsim khoom thiab txhim kho kev ua haujlwm ntawm cov txheej txheem plating, tom qab ntawd kev npaj thiab kev siv cov ntawv txiav ultra-thin yuav muaj kev txhim kho tseem ceeb thiab muaj txiaj ntsig zoo.
Xa kev nug
