Low Temperature Diamond Film Enhances Semiconductor Heat Dissipation

Nrog rau txoj kev loj hlob sai ntawm kev ua tau zoo ntawm - kev suav kev ua tau zoo, siab - cov khoom siv hluav taws xob hluav taws xob, thiab cov tshuab ntim khoom siab heev, chip heat dissipation tau dhau los ua ib qho tseem ceeb hauv kev txwv tsis pub muaj kev ua haujlwm thiab kev ntseeg tau. Pob zeb diamond suav hais tias yog cov khoom siv hluav taws xob zoo tshaj plaws rau cov tiam tom ntej ntawm kev sib xyaw ua ke thiab ntim khoom vim nws cov thermal conductivity siab heev thiab zoo heev dielectric zog.

 

Hauv rov qab- txheej txheem kawg (BEOL) kev tsim khoom, cov khoom ntim khoom kub feem ntau yuav tsum tau tswj ntawm 450℃C lossis qis dua kom tsis txhob muaj kev puas tsuaj rau cov hlau sib txuas uas twb muaj lawm thiab kev ua haujlwm ntawm cov khoom siv. Txawm li cas los xij, kev npaj cov yeeb yaj kiab pob zeb diamond nrog ob qho tib si txuas ntxiv, tsis muaj qhov tsis xws luag, thiab cov thermal conductivity ntawm qhov kub thiab txias tsis tshua muaj kev sib tw los ntawm kev lag luam thiab kev kawm.

 

Tsis ntev los no, xibfwb Zeng Yonghua pab neeg los ntawm lub koom haum ntawm Microelectronics ntawm National Cheng Kung University hauv Taiwan tau koom tes nrog cov kws tshawb fawb los ntawm TSMC thiab lwm tus los tawm tswv yim txog microwave plasma chemical vapor deposition (MPCVD) pob zeb diamond zaj duab xis npaj cov txheej txheem tsim nyog rau qhov kub thiab txias (450 degree), nrog rau thermal conductivity ntawm ntau tshaj 300 W / m · K. Cov txiaj ntsig kev tshawb fawb muaj npe "MPCVD cov yeeb yaj kiab nyias raws li cov khoom siv hluav taws xob rau rov qab kawg ntawm kab (BEOL) silicon nti fabrication" thiab tau luam tawm hauv Pob Zeb Diamond & Cov Khoom Siv.

 

Nyob rau hauv kev teb rau cov teeb meem ntawm cov nplej me me thiab ntom ntom ciam teb ua rau txo qis hauv thermal conductivity hauv kev npaj cov pob zeb diamond films nyob rau hauv qhov kub thiab txias, pab pawg neeg tshawb fawb tau ua tiav cov pob zeb diamonds txuas ntxiv thiab ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntawm silicon substrates los ntawm kev qhia txog kev faib 3 nm pob zeb diamond noob. Kev sim tau pom tias ntxiv qhov tsim nyog ntawm graphite slurry tuaj yeem txhawb kev loj hlob ntawm pob zeb diamond noob nplej thiab tiv thaiv cov noob los ntawm kev etched hauv ntshav, yog li txhim kho qhov zoo thiab thermal conductivity ntawm zaj duab xis.

 

Nyob rau hauv cov nqe lus ntawm cov txheej txheem optimization, pab neeg tshawb fawb tau kho lub thickness thiab grain loj ntawm pob zeb diamond films los ntawm kev tswj tus nqi ntawm graphite slurry ntxiv. Cov txiaj ntsig kev sim qhia tau hais tias ntxiv me me ntawm graphite slurry thaum lub sij hawm pib kev loj hlob tuaj yeem txhim kho kev loj hlob sai ntawm pob zeb diamond nplej, uas ua rau cov tuab tuab ntawm 50-100 nm rau cov yeeb yaj kiab thiab tswj cov thermal conductivity (kwv yees li 300 W / m · K). Nrog rau kev ncua sijhawm ntawm kev loj hlob, cov qoob loo loj ntawm pob zeb diamond films ntxiv, thiab thermal conductivity kuj nce raws li.

Kev ntsuas kev ua haujlwm thermal tau ua los ntawm Time Domain Thermal Reflection (TDTR) txoj kev, thiab cov txiaj ntsig tau pom tias thermal conductivity ntawm cov pob zeb diamond zaj duab xis tau nce nrog qhov nce ntawm cov nplej loj, thaum kawg ncav cuag lub thickness ntawm 200-}300 nm, thiab cov thermal conductivity tuaj yeem khaws cia nyob ib ncig ntawm 300 W / m · K. Piv nrog rau cov kev tshawb fawb ntawm cov pob zeb diamonds, cov cuab yeej siv tau zoo. conductivity ntawm cov yeeb yaj kiab ntawm qhov kub thiab txias.

Cov thev naus laus zis no tsis yog tsuas yog ua tau raws li qhov ntsuas kub tsawg ntawm BEOL cov txheej txheem, tab sis kuj tseem muab cov txheej txheem kev npaj cov pob zeb diamond ua kom zoo nrog cov ntawv thov dav dav. Pob zeb diamond zaj duab xis, ua cov khoom siv hluav taws xob zoo tshaj plaws, yuav muab kev txhawb zog rau kev lag luam semiconductor yav tom ntej hauv kev tswj xyuas thermal ntawm siab -kev ua tau zoo, 3D integrated circuits, thiab siab -cov khoom siv hluav taws xob semiconductor.