Pab Pawg Huaqiao University Uncovers Tshiab Friction Damage Mechanism Hauv Ib -Crystal Pob Zeb Diamond

Sep 12, 2026

Tso lus

Pab Pawg Huaqiao University Uncovers Tshiab Friction Damage Mechanism hauv Ib Leeg -Crystal Pob Zeb Diamond, Ua Ntej 4th-Tsim Semiconductor Processing

 

Ib leeg-pob zeb diamond crystal (SCD) tau dav lees paub tias yog cov khoom siv tseem ceeb rau lub cim thib plaub ntawm cov khoom siv hluav taws xob, ua tsaug rau nws qhov tshwj xeeb electron txav, ultra-siab thermal conductivity, ultra-wide bandgap thiab hardness heev. Nws tuav cov ntawv thov muaj peev xwm loj hauv siab - cov khoom siv fais fab, siab - zaus sensors, thermal tswj thiab qib siab optics. Ua ntej kev lag luam xa tawm, txawm li cas los xij, SCD feem ntau yuav tsum tau ua tiav qhov kev ua tiav kom ua tiav qhov xav tau geometry, qhov tseeb qhov tseeb thiab qhov tseeb ntawm qhov chaw. Deformation, tawg thiab theem transformation thaum lub sij hawm ua tau ntev lawm tseem ceeb bottlenecks limiting yield thiab machining precision.

 

Tsis ntev los no, pab pawg tshawb fawb coj los ntawm cov xibfwb Xu Xipeng thiab Huang Hui ntawm Huaqiao University tau ua kev tshawb fawb txog kev sib txhuam- ua rau muaj kev puas tsuaj hauv ib qho - pob zeb diamond. Lawv qhov kev tshawb pom, muaj npeTsim mechanism ntawm kev sib txhuam-induced directional ntoo-zoo li microcracks nyob rau hauv ib qho -pob zeb diamond, tau luam tawm nyob rau hauv lub authoritative thoob ntiaj teb phau ntawv journalInternational Journal of Mechanical Sciences. Txoj kev tshawb no nthuav tawm thawj zaug ntawm kev tsim cov txheej txheem ntawm kev sib txhuam-induced directional tree-zoo li microcracks, muab lub hauv paus tshiab rau kev ua haujlwm zoo, qis-kev puas tsuaj ntawm ib qho - siv lead ua pob zeb diamond.


 

01 Thawj Saib Xyuas: Tsob Ntoo Directional-Zoo li Microcracks Induced los ntawm Kev Sib Tw

Hauv kev sib txhuam zawv zawg qhov kev sim ntawm ib zaug -pob zeb diamond thiab quartz iav, pab pawg tshawb fawb tau pom ib tsob ntoo tshwj xeeb-zoo li microcrack morphology nrog cov yam ntxwv meej. Qhov morphology no tsis tshua muaj tshwm sim nyob rau hauv cov qauv kev sib txhuam zawv zawg, thiab sib txawv ntawm daim phiaj -zoo li cov kab nrib pleb uas pom nyob rau hauv kev ua tshuab thiab cov txheej txheem raws sij hawm tsim los ntawm kev ua laser.

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Kev pib microcrack yog tsom mus ze ntawm cov caws pliav thiab nthuav tawm raws cov lus qhia tshwj xeeb crystallographic. Raws li kev sib txhuam lub sij hawm nce, lub pob zeb diamond nto ua raws li qhov tseeb morphological evolution ib ntus:

  • ▸ Thawj theem: Hnav daim ntawv caws pliav thiab maj mam sib sib zog nqus
  • ▸ Nruab nrab theem: Cov kab nrib pleb zoo tshwm nyob ib ncig ntawm lub caws pliav
  • ▸ Theem lig: Cov kab nrib pleb txuas ntxiv mus, tsim cov ntoo dav dav -zoo li microcracks

Kev sim cov ntaub ntawv qhia tau hais tias deg roughness Sa nce los ntawm qhov pib 0.9 nm mus rau 36.7 nm, 112.4 nm thiab 141.1 nm tom qab 60, 90 thiab 120 feeb ntawm kev sib txhuam, feem, nrog kev puas tsuaj loj zuj zus ntxiv mus.


 

02 Interfacial Discharge: Cov ntsiab lus tseem ceeb rau kev puas tsuaj

Txhawm rau txheeb xyuas lub hauv paus chiv keeb ntawm tsob ntoo-zoo li microcracks, pab pawg tau soj ntsuam luminescence ntawm kev sib txhuam sib cuam tshuam thiab ua kev soj ntsuam siv qhov muag pom emission spectroscopy.

Thaum lub sij hawm kev sib txhuam, lub interface nthuav tawm luminescence txuas ntxiv nrog los ntawm kev sib tshuam khaus flashes. Cov yam ntxwv ncov cuam tshuam nrog cov pa tawm hauv huab cua tau kuaj pom hauv spectrum, qhia tias cov pa roj ionization thiab tso tawm tuaj yeem tshwm sim hauv micro- qhov khoob ntawm qhov sib txhuam.

⚠️ Nrhiav qhov tseem ceeb

Optical emission spectroscopy qhia txog qhov pom kev tawm ntawm cov roj theem ntawm qhov sib txuas thiab tsis tuaj yeem ua pov thawj ncaj qha dielectric tawg hauv pob zeb diamond. Txawm li cas los xij, qhov tshwm sim ntawm cov pa tawm yog qhov txuas tseem ceeb hauv cov ntaub ntawv pov thawj tiav ntawm "interfacial paug - hluav taws xob hluav taws xob hauv zos", muab cov ntsiab lus tseem ceeb rau kev txiav tawm cov kev puas tsuaj.

Ntxiv electrostatic finite element simulations qhia tias hnav caws pliav thiab interfacial micro- qhov khoob uas tsim los ntawm kev sib txhuam ua rau muaj kev cuam tshuam loj hauv cheeb tsam hluav taws xob. Nyob rau hauv tus neeg sawv cev qauv qhia nyob rau hauv daim ntawv, lub siab tshaj plaws normalized hluav taws xob teb ntawm lub corrugated interface mus txog 2.24 npaug ntawm ib tug ca interface. Qhov loj dua qhov roughness ntxiv ua kom lub zog hauv cheeb tsam siab tshaj plaws hluav taws xob thiab ua rau muaj qhov paug tawm ntau dua.


 

03 Kev puas tsuaj Mechanism: Coupling ntawm Fais Field Enhancement thiab Crystallographic Anisotropy

 

Kev sib koom ua ke ntawm kev sim ua tus cwj pwm, hluav taws xob simulation thiab kev ntsuas molecular dynamics, pab pawg tau npaj tsim cov txheej txheem ntawm kev sib txhuam-induced ntoo-zoo li microcracks hauv ib qho - siv lead ua pob zeb diamond:

Thaum lub sij hawm tsis tu ncua kev sib txhuam, nqi accumulates ntawm lub interface vim triboelectrification. Lub geometry nyob ze ntawm qhov hnav caws pliav ntxiv ua kom lub zog hluav taws xob hauv zos, ua rau muaj qhov cuam tshuam ntawm lub ntsej muag zoo dua hauv thaj tsam caws pliav. Rov ua dua cov nqi ntxiv thiab tso tawm ua rau cov ntsiab lus tawm ntawm cov caws pliav, muab qhov chaw nyiam rau kev pib microcrack.

 

Lub caij no, Raman spectroscopy thiab TEM / EELS tus cwj pwm qhia pom muaj cov pa roj carbon amorphous, graphitized carbon, lattice distortion, brittle fracture features and residual compressive stress around the microcracks, lees paub qhov tseem ceeb hauv zos kev hloov pauv hauv cheeb tsam tawg.

 

Molecular dynamics simulations ntxiv piav qhia txog qhov xwm txheej ntawm cov kab nrib pleb. Nyob rau hauv ib ntus thermal loading, lub pob zeb diamond (001) nto undergoes anisotropic amorphization: cov txheej txheem teeb meem raws lub<100>kev taw qhia yog pronounced tshaj nyob rau hauv<110>kev taw qhia, thiab txheej amorphous tsim nrog<100>yog tuab. Qhov crystallographic anisotropy no ncaj qha txhawb kev tawg tawm ntawm cov lus qhia tshwj xeeb, thaum kawg tsim cov ntoo -zoo li morphology.

 


 

04 Kev lag luam cuam tshuam rau SCD Precision Machining

Lub ntsiab tseem ceeb ntawm qhov kev tshawb fawb no yog nyob rau hauv kev ua txhaum ntawm cov txheej txheem kev ua haujlwm ib txwm ua uas tsuas yog txiav txim siab txog kev siv tshuab thiab thermal. Thawj thawj zaug, triboelectrification thiab interfacial cov teebmeem hluav taws xob tau muab tso rau hauv kev tshuaj xyuas ntawm kev ua kev puas tsuaj hauv ib qho -pob zeb diamond.

 

Cov kev tshawb pom pom tau hais tias nyob rau hauv siab -kev sib txhuam ceev ntawm SCD, qhov cuam tshuam ntawm triboelectrification thiab cuam tshuam txog hluav taws xob cuam tshuam ntawm qhov chaw puas tsuaj yuav tsum tau txiav txim siab tag nrho ntxiv rau cov khoom siv sib xyaw ua ke thiab cov teebmeem thermal. Qhov kev txiav txim siab no muaj qhov tseem ceeb qhia qhov tseem ceeb rau kev ua kom zoo dua qub thiab cov cuab yeej tsim qauv ntawm cov pob zeb diamond tseem ceeb xws li xaim pom txiav, sib tsoo thiab polishing.

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Daim ntawv tseem sau tseg tias qhov hluav taws xob muaj zog thiab qhov kub ntawm qhov chaw nyob ib puag ncig thaum muaj kev sib txhuam tiag tiag tseem tsis tuaj yeem ua kom muaj nuj nqis, thiab qhov cuam tshuam ntawm cov yam ntxwv xws li zawv zawg ceev, thauj khoom, ambient humidity thiab grounding tej yam kev mob ntawm kev puas tsuaj yuav tsum tau ntxiv nyob rau hauv - tshawb xyuas qhov tob.


 

★ Cov ntsiab lus

Pab pawg hauv University of Huaqiao tau tsim cov txheej txheem kev sib txhuam ntawm kev sib txhuam -tsim ntoo- zoo li microcracks hauv ib qho - Crystal pob zeb diamond, nthuav tawm cov kev ua tiav ntawm "kev txhim kho hauv zos hluav taws xob - kev sib cuam tshuam - hauv zos electrothermal puas tsuaj - crystallographic anisotropic propagation".

 

Raws li ib tug thib plaub - tiam semiconductor cov ntaub ntawv, lub industrialization ntawm ib leeg - siv lead ua pob zeb diamond yog heev nyob ntawm qhov kev ua tau zoo ntawm precision processing technology. Qhov kev tshawb fawb no tsis tsuas yog ua kom cov txheej txheem theoretical ntawm pob zeb diamond tribology thiab kev puas tsuaj, tab sis tseem muab kev txhawb nqa theoretical tseem ceeb rau kev txhim kho cov txheej txheem kev puas tsuaj tsawg thiab cov cuab yeej tshwj xeeb.


 

Tsis lees paub

Kab lus no yog kev txhais lus ntawm kev tshawb fawb kev kawm, muab tso ua ke los ntawm cov ntaub ntawv tshaj tawm rau pej xeem siv rau kev lag luam thiab kev sib txuas lus nkaus xwb. Nws tsis yog ib qho kev, kev nqis peev lossis kev txiav txim siab ua haujlwm- ua hauv paus. Cov kev tshawb fawb xaus tau hais hauv no tsuas yog cov kev xav ntawm cov neeg sau ntawv thawj. Peb tsis muaj kev lees paub los yog kev lees paub txog qhov raug lossis ua tiav ntawm cov ntaub ntawv. Thov qhia qhov chaw thaum luam tawm dua.

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